Tsuneo Amano: search on Z-Library

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1

Observation of phase defect on extreme ultraviolet mask using an extreme ultraviolet microscope

Amano, Tsuyoshi, Terasawa, Tsuneo, Watanabe, Hidehiro, Toyoda, Mitsunori, Harada, Tetsuo, Watanabe, Takeo, Kinoshita, Hiroo

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2014

Language:

english

File:

PDF, 3.73 MB

english, 2014

2

Impact of the phase defect structure on an actinic dark-field blank inspection signal and wafer printability

Amano, Tsuyoshi, Arisawa, Yukiyasu, Terasawa, Tsuneo

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2013

Language:

english

File:

PDF, 5.02 MB

english, 2013

3

Extreme ultraviolet mask defect inspection with a half pitch 16-nm node using simulated projection electron microscope images

Iida, Susumu, Amano, Tsuyoshi, Hirano, Ryoichi, Terasawa, Tsuneo, Watanabe, Hidehiro

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2013

Language:

english

File:

PDF, 5.34 MB

english, 2013

4

Patterned mask inspection technology with projection electron microscope technique on extreme ultraviolet masks

Hirano, Ryoichi, Iida, Susumu, Amano, Tsuyoshi, Terasawa, Tsuneo, Watanabe, Hidehiro, Hatakeyama, Masahiro, Murakami, Takeshi, Terao, Kenji

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2014

Language:

english

File:

PDF, 4.60 MB

english, 2014

5

Propagation of surface topography of extreme ultraviolet blank substrate through multilayer and impact of phase defect structure on wafer image

Amano, Tsuyoshi, Terasawa, Tsuneo

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2013

Language:

english

File:

PDF, 3.29 MB

english, 2013

6

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Extreme Ultraviolet (EUV) Lithography II - Evaluation of EUV mask defect using blank inspection, patterned mask inspection, and wafer inspection

Kamo, Takashi, La Fontaine, Bruno M., Naulleau, Patrick P., Terasawa, Tsuneo, Yamane, Takeshi, Shigemura, Hiroyuki, Takagi, Noriaki, Amano, Tsuyoshi, Tawarayama, Kazuo, Nozoe, Mari, Tanaka, Toshihiko,

Year:

2011

Language:

english

File:

PDF, 8.44 MB

english, 2011

7

Particle Orbits in a Heliotron Magnetic Field

Amano, Tsuneo, Murakami, Masanori, Outi, Akizi

Journal:

Journal of the Physical Society of Japan

Year:

1965

File:

PDF, 1.22 MB

1965

8

A method to solve the impurity diffusion equation with ionization and recombination source terms

Masao Okamoto, Tsuneo Amano

Journal:

Journal of Computational Physics

Year:

1978

Language:

english

File:

PDF, 425 KB

english, 1978

9

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 23 February 2014)] Extreme Ultraviolet (EUV) Lithography V - At wavelength observation of phase defect embedded in EUV mask using microscope technique

Wood, Obert R., Panning, Eric M., Terasawa, Tsuneo, Amano, Tsuyoshi, Yamane, Takeshi, Watanabe, Hidehiro, Toyoda, Mitsunori, Harada, Tetsuo, Watanabe, Takeo, Kinoshita, Hiroo

Year:

2014

Language:

english

File:

PDF, 1.88 MB

english, 2014

10

Development of extreme ultraviolet mask pattern inspection technology using projection electron beam optics

Hirano, Ryoichi, Watanabe, Hidehiro, Iida, Susumu, Amano, Tsuyoshi, Terasawa, Tsuneo, Hatakeyama, Masahiro, Murakami, Takeshi

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2013

Language:

english

File:

PDF, 2.94 MB

english, 2013

11

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 23 February 2014)] Extreme Ultraviolet (EUV) Lithography V - Analysis of phase defect effect on contact hole pattern using a programmed phase defect in EUVL mask

Wood, Obert R., Panning, Eric M., Kim, Yongdae, Terasawa, Tsuneo, Amano, Tsuyoshi, Oh, Sunghyun, Hyun, Yoonsuk, Watanabe, Hidehiro

Year:

2014

Language:

english

File:

PDF, 958 KB

english, 2014

12

Corticosteroid- and cyclophosphamide-free treatment of anti-neutrophil cytoplasmic antibody-associated vasculitis using tocilizumab

Sakai, Ryota, Shibata, Akiko, Chino, Kentaro, Kondo, Tsuneo, Okuyama, Ayumi, Takei, Hirofumi, Amano, Koichi

Journal:

Modern Rheumatology

Year:

2015

Language:

english

File:

PDF, 309 KB

english, 2015

13

SPIE Proceedings [SPIE Photomask and NGL Mask Technology XVII - Yokohama, Japan (Tuesday 13 April 2010)] Photomask and Next-Generation Lithography Mask Technology XVII - FIB-CVD technology for EUV mask repair

Amano, Tsuyoshi, Hosono, Kunihiro, Takagi, Noriaki, Shigemura, Hiroyuki, Terasawa, Tsuneo, Suga, Osamu, Shiina, Kensuke, Aramaki, Fumio, Kozakai, Tomokazu, Matsuda, Osamu, Yasaka, Anto

Year:

2010

Language:

english

File:

PDF, 659 KB

english, 2010

14

Combination of Ascorbic Acid and Methylprednisolone Pulse Therapy in the Treatment of Idiopathic Thrombocytopenic Purpura.

MASUGI, Jiro, IWAI, Masahide, KIMURA, Sachiko, OCHI, Fukashi, SUZUKI, Kotaro, NAKANO, Osamu, SAKAMOTO, Taizo, FUKUNAGA, Hideyuki, AMANO, Masahiko, FUKUDA, Tsuneo

Journal:

Internal Medicine

Year:

1994

Language:

english

File:

PDF, 352 KB

english, 1994

15

Possible mechanism of benzoyl-pyrimidopyrimidine derivatives as novel analgesics

MORITOKI, Hideki, HISAYAMA, Tetsuhiro, AMANO, Yuichiro, KIDA, Kan, IWAMOTO, Takesi, YASUDA, Tsuneo, KOHRI, Hideaki

Journal:

Folia Pharmacologica Japonica

Year:

1996

File:

PDF, 3.91 MB

1996

16

Successful treatment with tocilizumab monotherapy for Takayasu arteritis developing during infliximab therapy in a patient with ulcerative colitis

Shibata, Akiko, Kurasawa, Takahiko, Okada, Yusuke, Chino, Kentaro, Saito, Shuntaro, Okuyama, Ayumi, Takei, Hirofumi, Sakai, Ryota, Kondo, Tsuneo, Amano, Koichi

Journal:

Modern Rheumatology Case Reports

Year:

2018

Language:

english

File:

PDF, 616 KB

english, 2018

17

Lysophosphatidylcholine, a Component of Stromal Phospholipids, as a Candidate Vasoconstrictive Factor in Stroma-Free Hemoglobin

Kunihiko Nakai, Noriko Matsuda, Toshio Ohta, Miyuki Amano, Tsuneo A. Takahashi, Ichiro Sakuma, Akira Kitabatake, Shigeo Ito, Yoshikazu Nakazato, Sadayoshi Sekiguchi

Journal:

Artificial Organs

Year:

1994

Language:

english

File:

PDF, 754 KB

english, 1994

18

Hydromagnetic Local Instability in an Axially Symmetric Incompressible Plasma

Amano, Tsuneo, Momota, Hiromu

Journal:

Progress of Theoretical Physics

Year:

1964

Language:

english

File:

PDF, 561 KB

english, 1964

19

Decay Instability of Cyclotron Harmonic Plasma Waves

Amano, Tsuneo, Okamoto, Masao

Journal:

Journal of the Physical Society of Japan

Year:

1970

File:

PDF, 927 KB

1970

20

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Extreme Ultraviolet (EUV) Lithography IV - Propagation of surface topography of EUV blank substrate through multilayer and impact of phase defect structure on wafer image

Amano, Tsuyoshi, Naulleau, Patrick P., Terasawa, Tsuneo

Year:

2013

Language:

english

File:

PDF, 678 KB

english, 2013

21

SPIE Proceedings [SPIE Photomask and Next-Generation Lithography Mask Technology XIV - Yokohama, Japan (Tuesday 17 April 2007)] Photomask and Next-Generation Lithography Mask Technology XIV - Evaluation of defect inspection sensitivity using 199-nm inspection optics

Amano, Tsuyoshi, Watanabe, Hidehiro, Nishiyama, Yasushi, Shigemura, Hiroyuki, Terasawa, Tsuneo, Suga, Osamu, Hashimoto, Hideaki, Murakami, Shingo, Kikuiri, Nobutaka

Year:

2007

Language:

english

File:

PDF, 552 KB

english, 2007

22

SPIE Proceedings [SPIE Photomask and NGL Mask Technology XV - Yokohama, Japan (Wednesday 16 April 2008)] Photomask and Next-Generation Lithography Mask Technology XV - Damage analysis of EUV mask under Ga focused ion beam irradiation

Nishiyama, Yasushi, Horiuchi, Toshiyuki, Amano, Tsuyoshi, Shigemura, Hiroyuki, Terasawa, Tsuneo, Suga, Osamu, Kozakai, Tomokazu, Kikuchi, Syuichi, Shiina, Kensuke, Yasaka, Anto, Hagiwara, Ryoji

Year:

2008

Language:

english

File:

PDF, 619 KB

english, 2008

23

Analysis of image distortion on projection electron microscope image

Iida, Susumu, Hirano, Ryoichi, Terasawa, Tsuneo, Amano, Tsuyoshi, Watanabe, Hidehiro

Journal:

Japanese Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 803 KB

english, 2014

24

SPIE Proceedings [SPIE Photomask Japan 2014 - Yokohama, Japan (Tuesday 15 April 2014)] Photomask and Next-Generation Lithography Mask Technology XXI - Development of new inspection system with novel PEM for EUV pattern masks and its performance evaluation

Kato, Kokoro, Hatakeyama, Masahiro, Murakami, Takeshi, Terao, Kenji, Watanabe, Kenji, Tohma, Yasushi, Amano, Tsuyoshi, Hirano, Ryoichi, Iida, Susumu, Terasawa, Tsuneo, Watanabe, Hidehiro

Year:

2014

Language:

english

File:

PDF, 2.17 MB

english, 2014

25

Comparison of retention times of polypeptides in reversed phase high performance liquid chromatography on polystyrene resin and on alkyl bonded silica.

KUROSU, Yasuyuki, KAWASAKI, Hiroshi, CHEN, Xian-Chuan, AMANO, Yasuhiko, FANG, Yan-Il, ISOBE, Toshihiko, OKUYAMA, Tsuneo

Journal:

Year:

1984

Language:

english

File:

PDF, 868 KB

english, 1984

26

Simulation Analysis of the Characteristics of a High Magnification Imaging Optics for the Observation of Extreme Ultraviolet Lithography Mask to Predict Phase Defect Printability

Terasawa, Tsuneo, Arisawa, Yukiyasu, Amano, Tsuyoshi, Yamane, Takeshi, Watanabe, Hidehiro, Toyoda, Mitsunori, Harada, Tetsuo, Kinoshita, Hiroo

Journal:

Japanese Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 912 KB

english, 2013

27

Cyclotron Instabilities in a Finite Pressure Plasma. I

Amano, Tsuneo, Shimomura, Yasuo, Yamamoto, Shin

Journal:

Journal of the Physical Society of Japan

Year:

1972

File:

PDF, 972 KB

1972

28

Simulation of Burning Plasma Dynamics in ITER

Wang, Ji-Feng, Amano, Tsuneo, Ogawa, Yuichi, Inoue, Nobuyuki

Journal:

Fusion Technology

Year:

1997

Language:

english

File:

PDF, 1.08 MB

english, 1997

29

Study of shock absorbed function on artifical sand grass.

MAKI, Tsuneo, AMANO, Kagetoshi, OMOTO, Shinobu, TAMAKI, Toshihiro

Journal:

Doboku Gakkai Ronbunshu

Year:

1991

File:

PDF, 3.12 MB

1991

30

Prevalence of hypertrophic cardiomyopathy in a population of adult japanese workers as detected by echocardiographic screening

Yoshiyuki Hada, Tsuguya Sakamoto, Keiko Amano, Tsuneo Yamaguchi, Katsu Takenaka, Hisako Takahashi, Reiko Takikawa, Ichiro Hasegawa, Toshiyuki Takahashi, Jun-Ichi Suzuki, Tsuneaki Sugimoto, Kin-Ichi Sa

Journal:

The American Journal of Cardiology

Year:

1987

Language:

english

File:

PDF, 206 KB

english, 1987

31

Demonstrating 30-nm spatial resolution of three-multilayer-mirror objective for extreme ultraviolet microscopy: Imaging test by observing lithography mask

Toyoda, Mitsunori, Yamasoe, Kenjiro, Tokimasa, Akifumi, Uchida, Kentaro, Harada, Tetsuo, Terasawa, Tsuneo, Amano, Tsuyoshi, Watanabe, Takeo, Yanagihara, Mihiro, Kinoshita, Hiroo

Journal:

Applied Physics Express

Year:

2014

Language:

english

File:

PDF, 2.07 MB

english, 2014

32

SPIE Proceedings [SPIE Photomask and Next-Generation Lithography Mask Technology XIV - Yokohama, Japan (Tuesday 17 April 2007)] Photomask and Next-Generation Lithography Mask Technology XIV - Thermal analysis of EUV mask under inspection laser beam irradiation

Nishiyama, Yasushi, Amano, Tsuyoshi, Shigemura, Hiroyuki, Terasawa, Tsuneo, Suga, Osamu, Watanabe, Hidehiro

Year:

2007

Language:

english

File:

PDF, 304 KB

english, 2007

33

SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 6 October 2008)] Photomask Technology 2008 - Ga implantation and interlayer mixing during FIB repair of EUV mask defects

Nishiyama, Yasushi, Kawahira, Hiroichi, Zurbrick, Larry S., Amano, Tsuyoshi, Shigemura, Hiroyuki, Terasawa, Tsuneo, Suga, Osamu, Kozakai, Tomokazu, Aramaki, Fumio, Shiina, Kensuke, Yasaka, Anto, Hagiw

Year:

2008

Language:

english

File:

PDF, 700 KB

english, 2008

34

Numerical Investigation of the Time Evolution of Impurity Concentration in a Tokamak

Amano, Tsuneo, Okamoto, Masao

Journal:

Journal of the Physical Society of Japan

Year:

1977

File:

PDF, 691 KB

1977

35

Stability of Reverse Field Diffuse Pinch

Amano, Tsuneo, Tamai, Tadamoto, Wakatani, Masahiro

Journal:

Journal of the Physical Society of Japan

Year:

1972

File:

PDF, 1.02 MB

1972

36

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 23 February 2014)] Extreme Ultraviolet (EUV) Lithography V - Observation of phase defect on extreme ultraviolet mask using an extreme ultraviolet microscope

Wood, Obert R., Panning, Eric M., Amano, Tsuyoshi, Terasawa, Tsuneo, Watanabe, Hidehiro, Toyoda, Mitsunori, Harada, Tetsuo, Watanabe, Takeo, Kinosihta, Hiroo

Year:

2014

Language:

english

File:

PDF, 581 KB

english, 2014

37

SPIE Proceedings [SPIE Photomask and NGL Mask Technology XX - Yokohama, Japan (Tuesday 16 April 2013)] Photomask and Next-Generation Lithography Mask Technology XX - Development of optical system on novel Projection Electron Microscopy (PEM) for EUV masks and its basic performance evaluation

Hatakeyama, Masahiro, Murakami, Takeshi, Terao, Kenji, Watanabe, Kenji, Naito, Yoshihiko, Amano, Tsuyoshi, Hirano, Ryoichi, Iida, Susumu, Terasawa, Tsuneo, Watanabe, Hidehiro, Kato, Kokoro

Year:

2013

Language:

english

File:

PDF, 395 KB

english, 2013

38

SPIE Proceedings [SPIE Photomask and NGL Mask Technology XIX - Yokohama, Japan (Tuesday 17 April 2012)] Photomask and Next-Generation Lithography Mask Technology XIX - Study of EUV mask inspection using projection EB optics with programmed pattern defect

Hirano, Ryoichi, Watanabe, Hidehiro, Iida, Susumu, Amano, Tsuyoshi, Terasawa, Tsuneo, Hatakeyama, Masahiro, Murakami, Takeshi, Kato, Kokoro

Year:

2012

Language:

english

File:

PDF, 2.20 MB

english, 2012

39

Boosting Up of Neutral Beam Heating Power by Slowly Rising Toroidal Field

Lin, Rui-yan, Hirano, Kei-ichi, Okamoto, Masao, Shimizu, Katsu-hiro, Amano, Tsuneo

Journal:

Journal of the Physical Society of Japan

Year:

1982

File:

PDF, 994 KB

1982

40

Residual-type mask defect printability for extreme ultraviolet lithography

Amano, Tsuyoshi, Iida, Susumu, Hirano, Ryoichi, Terasawa, Tsuneo, Watanabe, Hidehiro, Inazuki, Yuichi

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2012

Language:

english

File:

PDF, 2.10 MB

english, 2012

41

Impact of electron scattering in extreme ultraviolet reflective multilayer on electron image

Iida, Susumu, Amano, Tsuyoshi, Hirano, Ryoichi, Terasawa, Tsuneo, Watanabe, Hidehiro

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2013

Language:

english

File:

PDF, 2.38 MB

english, 2013

42

Transport simulations of H-mode plasmas with ITER database

Hiwatari, Ryoji, Ogawa, Yuichi, Amano, Tsuneo

Journal:

Plasma Physics and Controlled Fusion

Year:

1998

Language:

english

File:

PDF, 206 KB

english, 1998

43

Successful Treatment of Class IV+V Lupus Nephritis with Combination Therapy of High-dose Corticosteroids, Tacrolimus and Intravenous Cyclophosphamide

Kurasawa, Takahiko, Nagasawa, Hayato, Nishi, Eiko, Takei, Hirofumi, Okuyama, Ayumi, Kondo, Tsuneo, Nishimura, Koji, Sakai, Ryota, Shibata, Akiko, Chino, Kentaro, Ogawa, Hiroe, Ito, Tatsuya, Amano, Koi

Journal:

Internal Medicine

Year:

2013

Language:

english

File:

PDF, 644 KB

english, 2013

44

Nonthermal Titanium Kα Spectra from Lower-Hybrid-Current-Driven Plasmas in the JIPPT-IIU Tokamak

Morita, Shigeru, Ohkubo, Kunizo, Amano, Tsuneo, Kawahata, Kazuo, Masai, Kuniaki, Toi, Kazuo

Journal:

Journal of the Physical Society of Japan

Year:

1991

File:

PDF, 934 KB

1991

45

Microscopic carcinoma of the breast —Report of a case

Masayuki Nishiki, Kuniki Amano, Motoi Yamane, Katsuki Yasuda, Tsuneo Okumichi, Haruo Ezaki

Journal:

Year:

1984

Language:

english

File:

PDF, 533 KB

english, 1984

46

Echophonocardiographic study of the initial low frequency component of the first heart sound

Yoshiyuki Hada, Katsu Takenaka, Toshiyuki Ishimitsu, Tsuneo Yamaguchi, Keiko Amano, Hisako Takahashi, Reiko Takikawa, Tsuguya Sakamoto

Journal:

Journal of the American College of Cardiology

Year:

1983

Language:

english

File:

PDF, 1.14 MB

english, 1983

47

Current clinical evidence of tocilizumab for the treatment of ANCA-associated vasculitis: a prospective case series for microscopic polyangiitis in a combination with corticosteroids and literature review

Sakai, Ryota, Kondo, Tsuneo, Kurasawa, Takahiko, Nishi, Eiko, Okuyama, Ayumi, Chino, Kentaro, Shibata, Akiko, Okada, Yusuke, Takei, Hirofumi, Nagasawa, Hayato, Amano, Koichi

Journal:

Clinical Rheumatology

Year:

2017

Language:

english

File:

PDF, 515 KB

english, 2017

48

Numerical Simulation of Density Evolution in JIPP T-2 Tokamak

Shimizu, Katsuhiro, Okamoto, Masao, Amano, Tsuneo

Journal:

Journal of the Physical Society of Japan

Year:

1981

File:

PDF, 983 KB

1981

49

Monte Carlo Studies of Transport in a Reversed Field Pinch

S. Chen, T., Nagata, Akiyoshi, Sato, Koichi, Ashida, Hisao, Amano, Tsuneo

Journal:

Journal of the Physical Society of Japan

Year:

1992

Language:

english

File:

PDF, 1.32 MB

english, 1992

50

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Extreme Ultraviolet (EUV) Lithography IV - Evaluation of novel projection electron microscopy (PEM) optics for EUV mask inspection

Hirano, Ryoichi, Naulleau, Patrick P., Iida, Susumu, Amano, Tsuyoshi, Terasawa, Tsuneo, Watanabe, Hidehiro, Terao, Kenji

Year:

2013

Language:

english

File:

PDF, 3.84 MB

english, 2013

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